GSSM Series Stainless Steel Inline Gas Cartridge Filter
The GSSM gas filter housing are made of electronic grade stainless steel and designed for gas filtration at high temperature and pressure in semiconductor processes. The filters feature high flow rates, low pressure drop and excellent chemical compatibility.
| Filter Media | Hydrophbic PTFE |
| Housing | 316L stainless steel |
| Support | PFA 440HP |
| Surface finish interior | 20 in Ra internal |
| O-ring | E-FKM(default) |
| Max. Working Temp. | 170℃ |
| Max. Operating DP | Forward 0.55MPa |
| Operating Conditions | |||
|---|---|---|---|
| Max. Working pressure | 5MPA @ 121°C | Removal rating | ≥ 0.003 μm |
| Max. Design flow | 15L/MIN | Filter area | 13.5 cm/0.015 ft |
| Leaking test | 100% helium test | Integrity test | 100% |
Compressed air, process special gas, toxic gas, dry gas dehydration, etc.
| GSSM | 300 | VVMM4 | |||
|---|---|---|---|---|---|
| Removal Rating | Adaptor | Length(mm) | |||
| 300 | 0.003um | VMM4 | 1/4”Gasket Steal(VCR).Male/Male | 84 | |
| 150 | 0.0015μm | SMM4 | 1/4”Compression Steal(Swagelok).Male inlet/outlet | 73 | |
| VFM4 | 1/4”Gasket Steal(VCR).Female inlet/Male outlet | 88 | |||
| VMF4 | 1/4”Gasket Steal(VCR).Male inlet/Female outlet | 100 | |||
