The CFPR series is a disposable capsule filter designed for photoresist processing. It is designed to remove particles generated during the use of photoresist and improve product yield.
It has a compact space structure, which reduces the residual material and liquid, and the integral design makes the replacement safer and faster. Manufacturing, testing and packaging in a clean room to ensure product cleanliness. Suitable for filtering in small flow occasions. There are a variety of materials to choose to meet a variety of needs.
Filter Media | PP/PTFE/NF |
Capsule | PP/PVDF |
Endcaps/Cage/Core | PP |
Max. Working Temp. | 40℃ |
Max. Operating DP | 0.4Mpa(25℃) |
CFPR | PP | 010 | 1 | ||||||
Capsule | Filter Media | Removal rating | Inlet & Outlet | Vent | |||||
---|---|---|---|---|---|---|---|---|---|
/ | PP | P | PP | 005 | 0.05μm | 1 | 8mm Swagelok | 1/8” Swagelok | |
V | PVDF | F | PTFE | 010 | 0.1μm | 2 | 1/4” Swagelok | 1/8” Swagelok | |
N | NF(PVDF capsule only) | 050 | 0.5μm | ||||||
100 | 1μm |