N-PFA Industrial Cartridge Filter
| Filter Media | PTFE | |||
|---|---|---|---|---|
| Capsule | PFA | |||
| Endcaps/Cage/Core | PFA | |||
| Max. Working Temp. | 180℃ | |||
| Max. working DP | 0.42MPa/25℃ | |||
| Membrane area | S1 | S2 | E1(83PFA filter) | Ex(83PFA filter) |
| 0.8m2/10" | 1.1m2/10" | 1.5m2/10" | 2.2m2/10" | |
H2SO4,H3PO4,HNO3,HCL,NH4OH,H2O2,TMAH
SC1,SC2,SPM, etc.
| NPFA | S1 | 002 | 05 | s64 | S | W | |||||
| Filter Area | Removal Rating | Length | Inlet & Outlet | cleanliness | Packaging | ||||||
|---|---|---|---|---|---|---|---|---|---|---|---|
| S1 | 001 | 10nm | 04 | 4" | F42 | Refer to N-PFA drawing | S | Semiconductor grade | / | Without Prewet | |
| S2 | 0015 | 15nm | 10 | 10" | F62 | E | Electronic grade | W | <25ppb | ||
| E1(83) | 002 | 20nm | 20 | 20" | F82 | CW | <10ppb | ||||
| E2(83) | 003 | 30nm | S42 | ||||||||
| 005 | 0.05μm | S62 | |||||||||
| 010 | 0.1μm | ||||||||||
| 020 | 0.2μm | ||||||||||
| 050 | 0.5μm | ||||||||||
