M-PFA Industrial Cartridge Filter
| Filter Media | PTFE | |||
|---|---|---|---|---|
| Capsule | PFA | |||
| Endcaps/Cage/Core | PFA | |||
| Max. Working Temp. | 95℃ | |||
| Max. working DP | Forward 0.39Mpa(25℃) Reverse 0.29Mpa(25℃) | |||
| NPFA | 002 | 05 | s64 | S | W | |||||
| Removal Rating | Length | Inlet & Outlet | cleanliness | Packaging | ||||||
|---|---|---|---|---|---|---|---|---|---|---|
| 001 | 10nm | 02 | 2" | S8M | Refer to N-PFA drawing | S | Semiconductor grade | / | Without Prewet | |
| 0015 | 15nm | 04 | 4" | S3 | E | Electronic grade | W | <25ppb | ||
| 002 | 20nm | F3 | CW | <10ppb | ||||||
| 003 | 30nm | S4 | ||||||||
| 005 | 0.05μm | |||||||||
| 010 | 0.1μm | |||||||||
| 020 | 0.2μm | |||||||||
| 050 | 0.5μm | |||||||||
