T-PFA/L-PFA filters are constructed of imported high-purity PFA materials and PTFE membranes designed for high-temperature and critical applications. Strict control of the manufacturing process and cleanliness and all fluorine structures ensures T-PFA/L-PFA filters feature the best chemi compatibility, ultra-low metal extractable, and longer lifetime.
100% integrity tested to meet requirements of semicon ductor. Prewet packaging reduces equipment pre-oper action time. The disposable capsule filter design features better leakproofness, convenient installation and changeout, reduced downtime, and simplified system design.
Filter Media | PTFE | |||
Support | PFA | |||
Endcaps/Cage/Core | PFA | |||
Max. Working Temp. | 180℃ | |||
Max. Operating DP | 0.42MPa/25℃ | |||
Membrane area | S1 | S2 | E1(83 PFA filter) | E2(83 PFA filter) |
0.7m2/10" | 1.1m2/10" | 1.3m2/10" | 2.2m2/10" |
TPFA | S1 | 002 | 05 | 64 | S | W | |||||
Code | Filter Area | Removal Rating | Length | Inlet & Outlet | cleanliness | Packaging | |||||
TPFA | S1 | 2 | 0.02um | 05 | 5" | S64 | Inlet&Outlet3/4" Pillar Super Vent&Drain 1/2" Pillar Super | S | Semiconductor grade | / | Without Prewet |
LPFA | S2 | 5 | 0.05um | 10 | 10" | E | Electronic grade | W | <25ppb | ||
E1 | 10 | 0.1um | 20 | 20" | CW | <10ppb | |||||
E2 | 20 | 0.2um | |||||||||
50 | 0.5um |