Three-hole Lithography Capsule Filter
Lithography capsule filters guarantee that the materials used in lithography remain free from impurities, leading to superior end products. It is through intricate filtration processes, selectively allowing only the desired particles to pass through, leaving contaminants behind in the capsule.
The CFTH series is specially suitable for flat panel and lithography applications.
The CFTH series provide critical particle removal performance for pigment-dispersed color resists.
The built-in filter structure can minimize pollution. The compact and stable design makes it easy to install or modify existing tools. It can be replaced in less than one minute, without any tools or draining, minimizing dripping and leakage.
| Filter Media | PTFE/PP |
| Support | PP,HDPE |
| Sealing | FEP/Viton,EPDM |
| Capsule | HDPE |
| Max. Working Temp. | 0.39Mpa(25℃) |
| Max. Operating DP | 0.27Mpa(25℃) |
| 40℃ |
| CFTH | 02 | PTFE | 010 | 442 | |||||
| Code | Length | Filter Media | Removal Rating | Inlet&Outlet | Vent | ||||
| CFTHE | 02 | 2.5" | PTFE | 005 | 0.5um | 442 | 12.7mm | 6.35mm | |
| CFTHP | 05 | 5" | PP3 | 010 | 0.1um | 332 | 9.53mm | 6.35mm | |
| 022 | 0.22un | 222 | 6.35mm | 6.35mm | |||||
| 045 | 0.45um | 884 | 8mm | 4mm | |||||
| 060 | 0.6um | 664 | 6mm | 4mm | |||||
| 120 | 1.2um | ||||||||
| 500 | 5um | ||||||||
| ... | ... | ||||||||
